METAL WITH DIAMOND-LIKE CARBON FILM, AND METHOD FOR FORMING DIAMOND-LIKE CARBON FILM

摘要

An objective is to provide a metal object with diamond-like carbon film including a diamond-like carbon film easily formed on metal and a method for forming the diamond-like carbon film. A metallic film formation target 30 which is an object on which a diamond-like carbon film is to be formed is placed in a flow channel 14 through which film formation gas containing methane gas flows. The film formation gas RG is caused to flow at a predetermined flow rate through the flow channel 14 during the process of raising the temperature of the film formation target 30 from room temperature to a predetermined temperature. The film formation gas RG is thereby reacted with impurities in a film formation target surface 30f for removal of the impurities from the film formation target surface 30f and is further reacted with metallic elements exposed by the removal of impurities, thus forming a diamond-like carbon film 34 on the film formation target surface 30f.