| 摘要 |
PROBLEM TO BE SOLVED: To provide a surface treatment agent for a polishing pad and a spray for a polishing pad by which a thin and uniform film made of a thermosetting resin can be formed on the surface of a polishing pad without replacing a used pad with new one.SOLUTION: The spray 1 for the polishing pad is provided by filling a spray container 2 with a surface treatment agent for a polishing pad made of a dispersant 3 prepared by dispersing a thermosetting resin, such as urethane resin and epoxy resin, in a solvent and showing a viscosity of 1,000 cP (centipoise) or lower at 20°C and with a high-pressure gas. |
