| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a stage device having a brake mechanism generating sufficient braking force when stopping a stage, without increasing the weight of a moving table. <P>SOLUTION: The stage mechanism 1 is composed of an X guide 121 which is a guiding mechanism in an X-direction fixed on an X base 120, an X table 122 restrained by the X guide 121 and capable of moving in the X-direction, an X actuator 123 fixed by the X table at a moving part, and an X brake 124 which is a braking mechanism of the X table 122 fixed on the X base 120. The control device 2 generates braking force by pressing the X brake 124 against a lower surface of the X table 122 when stopping the stage, and controls to position the X actuator so as to turn off servo control after stopping the stage. <P>COPYRIGHT: (C)2012,JPO&INPIT</p> |
