膜厚方向に組成比が連続的に変化した薄膜の製造方法,申请号JP20120087038-传众专利搜索

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发明名称	膜厚方向に組成比が連続的に変化した薄膜の製造方法
摘要
申请公布号	JP5688664(B2)	申请公布日期	2015.03.25
申请号	JP20120087038	申请日期	2012.04.06
申请人		发明人
分类号	C23C14/35;C23C14/34;G02B5/28	主分类号	C23C14/35
代理机构		代理人
主权项
地址

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