| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a defect inspection device capable of detecting a defect before cut-off and changing a cut-off size of a test object according to the defect. <P>SOLUTION: A defect inspection device includes: a defect detection unit that detects a defect in a test object conveyed in an uncut state and to be cut off in a direction orthogonal to a conveyance direction by a cutting device; and a control unit that outputs, to the cutting device, a control signal that instructs, before the test object reaches a cutting position where the test object is cut off by the cutting device into a first size which is predetermined, to cut the test object into a second size smaller than the first size if a defect is detected within a range of the test object to be cut into the first size. <P>COPYRIGHT: (C)2012,JPO&INPIT</p> |
