发明名称 Laser-driven light source
摘要 <p>A laser-driven light source encompasses a chamber for accommodating an ionizable gas and an ignition source for ionizing the gas in the chamber for generating a plasma. The light source furthermore encompasses a laser for inputting laser energy into the plasma such that, under the impact of the laser radiation, the plasma emits useful light, which forms the output signal of the light source, wherein provision is made for means for coupling the useful light into a transferring optical fiber. In the case of the light source according to the invention, at least one mode scrambler is assigned to the optical fiber or the optical fibers.</p>
申请公布号 EP2851934(A1) 申请公布日期 2015.03.25
申请号 EP20140185633 申请日期 2014.09.19
申请人 QIOPTIQ PHOTONICS GMBH & CO. KG 发明人 BRUNE, EKKEHARD;FRERKING, DIETER;THÖNISS, THOMAS;SPRUCH, CLAUS
分类号 H01J65/04;G02B6/14;G02B27/09 主分类号 H01J65/04
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