发明名称 VERTICAL TYPE SEMICONDUCTOR DEVICE AND FORMING METHOD OF THE SAME
摘要 <p>A vertical-type semiconductor device includes a semiconductor substrate having a cell region and a peripheral circuit region, a wordline structure on the cell region of the semiconductor substrate, the wordline structure including a plurality of wordlines stacked on top of each other, a semiconductor structure through the wordline structure, a gate dielectric between the wordline structure and the semiconductor structure, and a dummy wordline structure on the peripheral circuit region, the dummy wordline structure having a vertical structure and including same components as the wordline structure.</p>
申请公布号 KR101502585(B1) 申请公布日期 2015.03.24
申请号 KR20080098896 申请日期 2008.10.09
申请人 发明人
分类号 H01L21/336;H01L29/78 主分类号 H01L21/336
代理机构 代理人
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