Semiconductor device

摘要

A semiconductor device includes a substrate having a plurality of active regions defined by a device isolation region, a plurality of conductive patterns on the plurality of active regions, each of the conductive patterns having side walls, a conductive line that faces the side walls of the conductive patterns with an air spacer therebetween on the active regions, the conductive line extending in a first direction, and a first insulating film covering the side walls of the conductive patterns between the air spacer and the conductive pattern. A lower portion of the first insulating film that is near the substrate protrudes toward the air spacer.

主权项

1. A semiconductor device, comprising:
a substrate having a plurality of active regions defined by a device isolation region; a plurality of conductive patterns on the plurality of active regions, each of the conductive patterns having side walls; a conductive line that faces the side walls of the conductive patterns with an air spacer therebetween on the active regions, the conductive line extending in a first direction; and a first insulating film covering the side walls of the conductive patterns between the air spacer and the conductive pattern, wherein a lower portion of the first insulating film that is near the substrate protrudes toward the air spacer, and wherein a portion of the air spacer that is adjacent to the lower portion of the first insulating film has a lesser width in a second direction that is perpendicular to the first direction than a remaining portion of the air spacer.