| 发明名称 | Biosensor capacitor | ||
| 摘要 | A biosensor capacitor, including a dielectric layer; a first metal layer in the dielectric layer; a passivation layer over the dielectric layer and the first metal layer; an isolation layer over the passivation layer; a probe DNA electrode connected to the first metal layer; a counter electrode connected to the first metal layer wherein the counter electrode forms an enclosure around the probe DNA electrode; and a bond pad connected to the first metal layer. | ||
| 申请公布号 | US8986523(B2) | 申请公布日期 | 2015.03.24 |
| 申请号 | US201213353523 | 申请日期 | 2012.01.19 |
| 申请人 | International Business Machines Corporation | 发明人 | Ackerson Kristin M.;Ellis-Monaghan John J.;Gambino Jeffrey P.;Lim Yen Li;Razina Polina A. |
| 分类号 | G01N27/327;G01R27/26;G01N27/22;H01L23/00;H01L23/522 | 主分类号 | G01N27/327 |
| 代理机构 | Hoffman Warnick LLC | 代理人 | LeStrange Michael J.;Hoffman Warnick LLC |
| 主权项 | 1. A biosensor capacitor, comprising: a dielectric layer; a first metal layer in the dielectric layer; a first diffusion barrier including a refractory metal over the first metal layer; a passivation layer over the dielectric layer and the first metal layer; an isolation layer over the passivation layer; a probe DNA electrode connected to the first metal layer; a counter electrode connected to the first metal layer wherein the counter electrode forms an enclosure around the probe DNA electrode; and a bond pad connected to the first metal layer. | ||
| 地址 | Armonk NY US | ||