Liquid jet head, liquid jet apparatus, and method of manufacturing liquid jet head

摘要

A liquid jet head includes an actuator portion having a first recessed portion, a second recessed portion, sidewalls made of a piezoelectric material and forming grooves provided between and communicating with respective ones of the first and second recessed portions, drive electrodes provided on respective ones of the sidewalls, and electrode terminals for transmitting a drive signal to respective ones of the drive electrodes. A cover plate has a first liquid chamber communicating with the first recessed portion for supplying liquid to the grooves and having a second liquid chamber communicating with the second recessed portion for discharging liquid from the grooves. A nozzle plate has nozzles communicating with respective ones of the grooves for ejecting liquid supplied to the grooves due to deformation of the sidewalls upon transmission of a drive signal by the electrode terminals to respective ones of the drive electrodes.

主权项

1. A liquid jet head, comprising:
an actuator portion comprising:
a first recessed portion;a second recessed portion formed at a distance from the first recessed portion;a channel row provided between the first recessed portion and the second recessed portion, the channel row including a plurality of channels each having one end portion opened to the first recessed portion and another end portion opened to the second recessed portion, the plurality of channels being formed of a plurality of grooves each sandwiched by two of a plurality of walls extending from the first recessed portion to the second recessed portion, each of the plurality of walls having a side surface made of a piezoelectric material and on which a drive electrode is provided;an electrode terminal row provided on a front surface on an outer peripheral side with respect to one of the second recessed portion and the first recessed portion, the electrode terminal row including a plurality of electrode terminals for transmitting a drive signal to the channel row; a cover plate including a first liquid chamber communicated with the first recessed portion and a second liquid chamber communicated with the second recessed portion, the cover plate being bonded to the actuator portion while exposing the electrode terminal row and covering the channel row; and a nozzle plate including a nozzle row which is formed of a row of nozzles communicated with the plurality of channels, the nozzle plate being bonded to the actuator portion on a side opposite to the cover plate, wherein wherein the plurality of electrode terminals are electrically connected to respective ones of the drive electrodes via respective wiring electrodes formed on a bottom portion of the one of the second recessed portion and the first recessed portion, and the one of the second recessed portion and the first recessed portion has a bottom surface including protrusions which are continuous with the walls and which remain when an upper part of the walls is removed, the wiring electrodes being formed on side surfaces of the protrusions and the bottom surface between adjacent protrusions.