Process for providing a magnetic recording transducer having a smooth magnetic seed layer

摘要

A method for providing a magnetic recording transducer is provided. The method includes providing a substrate, and a magnetic shield having a top surface above the substrate. The top surface is treated by a first plasma treatment performed at a first power. An amorphous ferromagnetic (FM) layer is deposited on and in contact with the top surface to a thickness of at least 5 Angstroms and not more than 50 Angstroms. A second plasma treatment is performed at a second power. A magnetic seed layer is provided on and contact with the amorphous FM layer. The magnetic seed layer may comprise a bilayer. A nonmagnetic spacer layer is provided above the magnetic seed layer, an antiferromagnetic (AFM) layer provided above the spacer layer, and a read sensor provided above the AFM layer.

主权项

1. A method for providing a magnetic recording transducer having a magnetic seed layer comprising:
providing a substrate; providing a magnetic shield having a first top surface above the substrate; treating the first top surface by a first plasma treatment performed at a first power; depositing an amorphous ferromagnetic (FM) layer on and in contact with the first top surface, the amorphous FM layer deposited to a thickness of at least 5 Angstroms and not more than 50 Angstroms; reducing the thickness of the amorphous FM layer by a second plasma treatment performed at a second power; providing a magnetic seed sublayer on and in contact with the amorphous FM layer, the magnetic seed layer including the amorphous FM layer and the magnetic seed sublayer; providing a nonmagnetic spacer layer above the magnetic seed sublayer; providing an antiferromagnetic (AFM) layer above the spacer layer; and providing a plurality of layers including a pinned layer, a reference layer, a barrier layer and a free layer of a read sensor above the AFM layer.