发明名称 Spectrometer
摘要 A spectrometer is provided. In one implementation, for example, a spectrometer comprises an excitation source, a focusing lens, a movable mirror, and an actuator assembly. The focusing lens is adapted to focus an incident beam from the excitation source. The actuator assembly is adapted to control the movable mirror to move a focused incident beam across a surface of the sample.
申请公布号 US8988678(B2) 申请公布日期 2015.03.24
申请号 US201113221899 申请日期 2011.08.31
申请人 MKS Technology 发明人 Watson Mark;Buller Shane;Carron Keith
分类号 G01J3/00;G01J3/06;G01J3/44;G01N21/65 主分类号 G01J3/00
代理机构 Dinsmore & Shohl LLP 代理人 Dinsmore & Shohl LLP
主权项 1. A spectrometer comprising: an excitation source for providing an excitation signal; a detector for detecting a spectroscopy signal; an optical system for directing an incident beam of the excitation signal toward a sample, receiving the spectroscopy signal from the sample, and providing the spectroscopy signal to the detector, wherein the optical system comprises: a focusing lens for focusing the incident beam from the excitation source;a moveable mirror; andan actuator assembly for controlling the moveable mirror to move a focused incident beam across a surface of the sample, wherein the actuator assembly comprises a rotary motor coupled to the moveable mirror and adapted to move the moveable mirror with respect to another optical element of the spectrometer via rotation of a shaft of the rotary motor, wherein the motor is coupled to the moveable mirror and is configured to rotate the moveable mirror, the moveable mirror is coupled to the motor via a flexible beam and an offset weight is coupled to the shaft of the rotary motor.
地址 Centennial WY US