Method and system for visualization of semiconductor wafer inspection data acquired in a photovoltaic cell production process

摘要

A system for providing visualization of semiconductor wafer inspection data acquired during in a photovoltaic cell production process includes a display device, a user interface device, and a computer control system configured for: receiving one or more inspection data sets acquired from each of a plurality of semiconductor wafers using a plurality of wafer process tools of a photovoltaic cell production line; generating an aggregated hierarchical wafer data gallery utilizing the received one or more inspection data sets; and displaying at least a portion of the aggregated hierarchical wafer data gallery in the gallery display area of the display device.

主权项

1. A system for providing visualization of semiconductor wafer inspection data acquired in a photovoltaic cell production process, comprising:
a display device, wherein the display device includes at least a data gallery display area and an imagery display area; a user interface device; a computer control system communicatively coupled to the display device and the user interface device, the computer control system configured for:
receiving one or more inspection data sets acquired from each of a plurality of semiconductor wafers using a plurality of inspection devices associated with a plurality of wafer process tools of a photovoltaic cell production line;generating an aggregated hierarchical wafer data gallery utilizing the received one or more inspection data sets, wherein said generating the aggregated hierarchical wafer data gallery includes defining a plurality of data grouping levels of the received one or more inspection data sets; anddisplaying at least a portion of the aggregated hierarchical wafer data gallery in the gallery display area of the display device.