发明名称 |
Window assembly for use in substrate processing systems |
摘要 |
Embodiments of a window assembly are provided herein. In some embodiments, a window assembly for use in a substrate processing system comprising a first window at least partially transparent to light energy; a second window transparent to light energy and substantially parallel to the first window; and a separator disposed proximate the peripheral edges of the first and second windows and defining a sealed gap between the first and second windows, wherein the separator has an inlet and outlet to flow a gas through the sealed gap. In some embodiments, one or more support elements are disposed in the sealed gap to maintain a substantially uniform gap distance between the first and second windows. In some embodiments, a plurality of light adjusting elements are disposed in the gap to adjust one or more properties of light energy that passes through the light adjusting element. |
申请公布号 |
US8986454(B2) |
申请公布日期 |
2015.03.24 |
申请号 |
US201113112109 |
申请日期 |
2011.05.20 |
申请人 |
Applied Materials, Inc. |
发明人 |
Carlson David K. |
分类号 |
C23C16/46;C23C16/52;H01L21/306;H01L21/67 |
主分类号 |
C23C16/46 |
代理机构 |
Moser Taboada |
代理人 |
Moser Taboada ;Taboada Alan |
主权项 |
1. A window assembly for use in a substrate processing system, comprising:
a first window at least partially transparent to light energy; a second window transparent to light energy and substantially parallel to the first window; a separator disposed proximate the peripheral edges of the first and second windows and defining a sealed gap between the first and second windows, wherein the separator has an inlet and outlet to flow a gas through the sealed gap; and a plurality of light adjusting elements disposed in the cap that adjust one or more properties of light energy that passes through the light adjusting element. |
地址 |
Santa Clara CA US |