| 摘要 |
<p>PURPOSE: A catalytic combustible hydrogen sensor and a manufacturing method thereof are provided to improve sensitivity using a catalyst in which platinum is diffused. CONSTITUTION: A catalytic combustible hydrogen sensor comprises a silicon substrate, a laminated film(4), an adhesive layer, a platinum heater(6), an insulating layer(7), and an electrode layer(8). The laminated film is formed on the top surface of the silicone substrate. The adhesive layer is formed to improve adhesive strength of the laminated film. The platinum heater is formed on the top of the adhesive layer, and senses hydrogen. The insulating layer is formed on the top of the platinum heater in which the electrode layer is not laminated. The electrode layer is formed in both ends of the platinum heater.</p> |
