发明名称 |
Systems and methods for measuring high-intensity light beams |
摘要 |
Systems and methods for measuring an intensity characteristic of a light beam are disclosed. The methods include directing the light beam into a prism assembly that includes a thin prism sandwiched by two transparent plates, and reflecting a portion of the light beam by total-internal-reflection surface to an integrating sphere while transmitting the remaining portion of the light beam through the two transparent plates to a beam dump. The method also includes detecting light captured by the integrating sphere and determining the intensity characteristic from the detected light. |
申请公布号 |
US8988674(B2) |
申请公布日期 |
2015.03.24 |
申请号 |
US201313953423 |
申请日期 |
2013.07.29 |
申请人 |
Ultratech, Inc. |
发明人 |
Anikitchev Serguei;Gaines David |
分类号 |
G01J1/04 |
主分类号 |
G01J1/04 |
代理机构 |
Opticus IP Law PLLC |
代理人 |
Opticus IP Law PLLC |
主权项 |
1. A method of measuring an intensity characteristic of a light beam, comprising:
directing the light beam into a prism assembly that includes a thin prism sandwiched by two transparent plates, wherein the thin prism has a width d and a total-internal-reflecting (TIR) surface having an area; reflecting a portion of the light beam by the TIR surface to an integrating sphere while transmitting the remaining portion of the light beam through the two transparent plates to a beam dump; detecting a portion of the light captured by the integrating sphere; and determining an intensity characteristic of the light beam from the detected light. |
地址 |
San Jose CA US |