发明名称 Systems and methods for measuring high-intensity light beams
摘要 Systems and methods for measuring an intensity characteristic of a light beam are disclosed. The methods include directing the light beam into a prism assembly that includes a thin prism sandwiched by two transparent plates, and reflecting a portion of the light beam by total-internal-reflection surface to an integrating sphere while transmitting the remaining portion of the light beam through the two transparent plates to a beam dump. The method also includes detecting light captured by the integrating sphere and determining the intensity characteristic from the detected light.
申请公布号 US8988674(B2) 申请公布日期 2015.03.24
申请号 US201313953423 申请日期 2013.07.29
申请人 Ultratech, Inc. 发明人 Anikitchev Serguei;Gaines David
分类号 G01J1/04 主分类号 G01J1/04
代理机构 Opticus IP Law PLLC 代理人 Opticus IP Law PLLC
主权项 1. A method of measuring an intensity characteristic of a light beam, comprising: directing the light beam into a prism assembly that includes a thin prism sandwiched by two transparent plates, wherein the thin prism has a width d and a total-internal-reflecting (TIR) surface having an area; reflecting a portion of the light beam by the TIR surface to an integrating sphere while transmitting the remaining portion of the light beam through the two transparent plates to a beam dump; detecting a portion of the light captured by the integrating sphere; and determining an intensity characteristic of the light beam from the detected light.
地址 San Jose CA US