发明名称 Method for obtaining a palladium surface finish for copper wire bonding on printed circuit boards and IC-substrates
摘要 The present invention relates to a method of bonding a copper wire to a substrate, particularly a printed circuit board and an IC-substrate, possessing a layer assembly comprising a copper bonding portion and a palladium or palladium alloy layer and a substrate having a copper wire bonded to aforementioned layer assembly.
申请公布号 US8987910(B2) 申请公布日期 2015.03.24
申请号 US201113996555 申请日期 2011.12.16
申请人 Atotech Deutschland GmbH 发明人 Özkök Mustafa;Ramos Gustavo;Kilian Arnd
分类号 H01L23/48;H01L21/44;H05K13/04;H01L23/498;H05K3/24;H01L23/00;H01B1/02;H05K1/09 主分类号 H01L23/48
代理机构 Renner, Otto, Boisselle & Sklar, LLP 代理人 Renner, Otto, Boisselle & Sklar, LLP
主权项 1. A method for forming a copper wire on a substrate, said substrate having at least one wire bonding portion made of copper or copper alloy comprising the steps of (i) providing a substrate having at least one wire bonding portion made of copper or copper alloy; (ii) forming a palladium layer on the at least one wire bonding portion, wherein the palladium is deposited from an electroless (autocatalytic) plating palladium bath comprising a palladium ion source; a complexing agent; a reducing agent and wherein the palladium content is more than 99.9 wt-%; and thereafter (iii) bonding a copper wire onto the palladium layer.
地址 Berlin DE US