发明名称 |
Method for obtaining a palladium surface finish for copper wire bonding on printed circuit boards and IC-substrates |
摘要 |
The present invention relates to a method of bonding a copper wire to a substrate, particularly a printed circuit board and an IC-substrate, possessing a layer assembly comprising a copper bonding portion and a palladium or palladium alloy layer and a substrate having a copper wire bonded to aforementioned layer assembly. |
申请公布号 |
US8987910(B2) |
申请公布日期 |
2015.03.24 |
申请号 |
US201113996555 |
申请日期 |
2011.12.16 |
申请人 |
Atotech Deutschland GmbH |
发明人 |
Özkök Mustafa;Ramos Gustavo;Kilian Arnd |
分类号 |
H01L23/48;H01L21/44;H05K13/04;H01L23/498;H05K3/24;H01L23/00;H01B1/02;H05K1/09 |
主分类号 |
H01L23/48 |
代理机构 |
Renner, Otto, Boisselle & Sklar, LLP |
代理人 |
Renner, Otto, Boisselle & Sklar, LLP |
主权项 |
1. A method for forming a copper wire on a substrate, said substrate having at least one wire bonding portion made of copper or copper alloy comprising the steps of
(i) providing a substrate having at least one wire bonding portion made of copper or copper alloy; (ii) forming a palladium layer on the at least one wire bonding portion, wherein the palladium is deposited from an electroless (autocatalytic) plating palladium bath comprising a palladium ion source; a complexing agent; a reducing agent and wherein the palladium content is more than 99.9 wt-%; and thereafter (iii) bonding a copper wire onto the palladium layer. |
地址 |
Berlin DE US |