Vapor deposition apparatus and method of manufacturing organic light-emitting display apparatus

摘要

A vapor deposition apparatus efficiently performs a deposition process to form a thin film with improved characteristics on a substrate, and a method manufactures an organic light-emitting display apparatus by using such vapor deposition apparatus. The vapor deposition apparatus includes a body including an upper member and a lateral member coupled to the upper member; a receiving portion disposed to face one side of the lateral member; a stage disposed in the receiving portion and supporting the substrate; a plurality of first injection portions disposed in the lateral member and injecting at least one gas into a space between the lateral member and the upper member; a second injection portion disposed in the upper member and injecting at least one gas into the space between the lateral member and the upper member; and a plasma generating portion including a coil and a power source connected to the coil.

主权项

1. A method of manufacturing an organic light-emitting display apparatus which comprises:
providing a substrate on a stage of a vapor deposition apparatus which comprises a plurality of modules, a receiving portion disposed in correspondence with all the modules, and the stage disposed within the receiving portion and the stage supporting the substrate, and forming a thin film on the substrate within a module among the plurality of modules while the substrate moves from one module to another, with each module comprising a body comprising an upper member and a lateral member coupled to the upper member, a plurality of first injection portions disposed in the lateral member and injecting at least one gas into a space between the lateral member and the upper member, a second injection portion disposed in the upper member and injecting at least one gas into the space between the lateral member and the upper member, and a plasma generating portion comprising a coil disposed at one surface of the upper member and a power source connected to the coil, the formation of the thin film on the substrate within the module among the plurality of modules comprising: moving the substrate within the module; injecting a source gas through the plurality of first injection portions; after the injection of the source gas, forming an atom layer of the source gas on the substrate by performing a first exhaust process by injecting a first purge gas through the second injection portion; after the formation of the atom layer of the source gas, injecting a reaction gas through the second injection portion; and after the injection of the reaction gas, forming an atom layer of the reaction gas on the substrate by performing a second exhaust process by injecting a second purge gas through the second injection portion.