Semiconductor devices and methods of making the same

摘要

In one embodiment, methods for making semiconductor devices are disclosed.

主权项

1. A method for making a semiconductor device, the method comprising:
forming two or more first metal electrode pads on a conductive metal substrate; forming two or more second metal electrode pads on the conductive metal substrate; forming a first dielectric layer on exposed regions of the conductive metal substrate between each of the first metal electrode pads and second metal electrode pads; forming two or more first inductive coils on the first dielectric layer, wherein each of the first inductive coils is electrically coupled to one of the first metal electrode pads; forming a second dielectric layer on the first inductive coils; forming two or more second inductive metal coils on the second dielectric layer, wherein each of the second inductive metal coils is electrically coupled to one of the second metal electrode pads; forming a third dielectric layer on the second inductive metal coils; forming two or more third metal electrode pads on the third dielectric layer, wherein each of the third contact pads are electrically coupled to one of the second inductive metal coils; electrically coupling one or more semiconductor dies to the third metal electrode pads; at least partially encapsulating the first dielectric layer, the second dielectric layer, the third dielectric layer, and the semiconductor dies in a molding material; and removing the conductive metal substrate to expose the first metal electrode pads and the second metal electrode pads.