发明名称 Heat assisted narrow pole design with trailing shield
摘要 A TAMR (Thermally Assisted Magnetic Recording) write head is formed with a narrow pole tip, a trailing edge magnetic shield and, optionally, a plasmon shield. The narrow pole tipped write head uses the energy of laser generated edge plasmons, formed in a plasmon generating layer, to locally heat a PMR magnetic recording medium slightly below its Curie temperature, Tc. When combined with the effects of the narrow tip, this local heating to a temperature below Tc is sufficient to create good transitions and narrow track widths in the magnetic medium. The write head is capable of writing effectively on state-of-the-art PMR recording media having Hk of 20 kOe or more.
申请公布号 US8986556(B2) 申请公布日期 2015.03.24
申请号 US201313758561 申请日期 2013.02.04
申请人 Headway Technologies, Inc. 发明人 Jin Xuhui;Zhou Yuchen;Takano Kenichi;Smyth Joe
分类号 H01L21/302;H01L21/461;B44C1/22;C03C15/00;C03C25/68;C23F1/00;G11B5/84;B82Y10/00;G11B5/31;G11B5/00 主分类号 H01L21/302
代理机构 Saile Ackerman LLC 代理人 Saile Ackerman LLC ;Ackerman Stephen B.
主权项 1. A method of forming a TAMR (thermally assisted magnetic recording) write head comprising: providing a magnetic write pole; using a first etching process, etching a narrow tip at an ABS end of said write pole, said narrow tip being a rectangular prism having a cross-sectional shape in an ABS plane comprising a rectangle capped at a trailing edge side by a triangular peak having a base width equal to the width of said rectangle; depositing a non-magnetic layer over said narrow tip, said layer covering said triangular peak and extending laterally and symmetrically to both sides of said narrow tip; using a second etching process, etching said non-magnetic layer to remove that portion covering said triangular peak but leaving a remaining portion abutting both lateral sides of said rectangular portion, said remaining portion sloping downward to form a continuation of said triangular peak and thence extending horizontally laterally and symmetrically; then forming a plasmon generating layer contiguously over exposed trailing edge surfaces of said narrow pole tip and said non-magnetic layer.
地址 Milpitas CA US