Wafer carrier track

摘要

Embodiments of the invention generally relate to apparatuses for chemical vapor deposition (CVD) processes. In one embodiment, a wafer carrier track for levitating and traversing a wafer carrier within a vapor deposition reactor system is provided which includes upper and lower sections of a track assembly having a gas cavity formed therebetween. A guide path extends along an upper surface of the upper section and between two side surfaces which extend along and above the guide path and parallel to each other. A plurality of gas holes along the guide path extends from the upper surface of the upper section, through the upper section, and into the gas cavity. In some examples, the upper and lower sections of the track assembly may independently contain quartz, and in some examples, may be fused together.

主权项

1. A wafer carrier track for levitating and traversing a wafer carrier within a vapor deposition reactor system, comprising:
an upper section of a track assembly disposed over a lower section of the track assembly; a gas cavity formed between the upper and lower sections of the track assembly; a guide path extending along an upper surface of the upper section; two side surfaces extending along and above the guide path and parallel to each other, wherein the guide path extends between the two die surfaces; a plurality of gas holes within the guide path and extending from the upper surface of the upper section, through the upper section, and into the gas cavity; and an upper lap joint disposed at one end of the track assembly and a lower lap joint disposed at the opposite end of the track assembly, wherein the upper lap joint extends a portion of the guide path and the two side surfaces and the lower lap joint comprises an upper surface extending further than the guide path and the two side surfaces of the track assembly and wherein a gas port extends from a side surface of the upper section of the track assembly, through a portion of the upper section of the track assembly, and into the gas cavity.