Superluminescent diode, method of manufacturing the same, and wavelength-tunable external cavity laser including the same

摘要

Provided are a high-speed superluminescent diode, a method of manufacturing the same, and a wavelength-tunable external cavity laser including the same. The superluminescent diode includes a substrate having an active region and an optical mode size conversion region, waveguides including an ridge waveguide in the active region and a deep ridge waveguide in the optical mode size conversion region connected to the active waveguide, an electrode disposed on the ridge waveguide; planarizing layers disposed on sides of the ridge waveguide and the deep ridge waveguide on the substrate, and a pad electrically connected to the electrode, the pad being disposed on the planarizing layers outside the active waveguide.

主权项

1. A superluminescent diode comprising:
a substrate having an active region and an optical mode size conversion region; waveguides including a ridge waveguide in the active region, a deep ridge waveguide in the optical mode size conversion region connected to the ridge waveguide; an electrode disposed on the ridge waveguide; planarizing layers disposed on an outside region of the ridge waveguide and the deep ridge waveguide on the substrate; and a pad electrically connected to the electrode, the pad being disposed on the planarizing layers at the outside region of the ridge waveguide, wherein the ridge waveguide comprises:
a clad layer; andan ohmic contact layer disposed on the clad layer, the ohmic contact layer including a lower surface facing the substrate, an upper surface opposite to the lower surface and a side surface that connects the lower and upper surfaces, and wherein the planarizing layers cover and contact the side surface of the ohmic contact layer.