发明名称 Magnetic memory and manufacturing method thereof
摘要 According to one embodiment, a magnetic memory is disclosed. The magnetic memory includes a substrate, and a contact plug provided on the substrate. The contact plug includes a first contact plug, and a second contact plug provided on the first contact plug and having a smaller diameter than that of the first contact plug. The magnetic memory further includes a magnetoresistive element provided on the second contact plug. The diameter of the second contact plug is smaller than that of the magnetoresistive element.
申请公布号 US8987846(B2) 申请公布日期 2015.03.24
申请号 US201314018215 申请日期 2013.09.04
申请人 发明人 Kumura Yoshinori
分类号 H01L29/82;H01L21/00;H01L43/02;H01L43/12;H01L27/24 主分类号 H01L29/82
代理机构 Holtz, Holtz, Goodman & Chick PC 代理人 Holtz, Holtz, Goodman & Chick PC
主权项 1. A magnetic memory comprising: a substrate; a contact plug provided on the substrate, the contact plug including a first contact plug, and a second contact plug provided on the first contact plug and having a smaller diameter than a diameter of the first contact plug, and the first and second contact plugs comprising a same material; and a magnetoresistive element provided on the second contact plug, wherein the diameter of the second contact plug is smaller than a diameter of the magnetoresistive element.
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