Method for the production of three-dimensional microstructures

摘要

A method for producing three-dimensional microstructures in which a source material is applied on a substrate, with a property changing by exposure with electromagnetic radiation. A three-dimensional source structure is written via spatially-resolving exposure in the source material, the source material is removed except for the source structure, and the source structure is molded with a target material, from which the microstructure to be produced is made. Here, a shell structure is provided surrounding the microstructure to be produced, with the source structure being created as the shell structure or the shell structure is produced using the source structure, and subsequently the target material is inserted into the shell structure.

主权项

1. A method for the production of three-dimensional microstructures, comprising the following steps:
applying a source material (1) having a property that is changeable by exposure to electromagnetic radiation (7) onto a substrate (2), writing a three-dimensional source structure (4, 8, 12) into the source material (1) via a locally resolving exposure by inserting a focused laser beam (5) into the source material (1) to directly form the three-dimensional source structure, removing the source material (1) except for the three-dimensional source structure (4, 8, 12), molding a target material which the micro-structure (10) to be produced is made from using the source structure, providing a shell structure surrounding a form of a microstructure (10) to be produced, with the source structure (8, 12) being created as the shell structure or the shell structure being produced using the source structure (12), and inserting the target material into the shell structure.