VIBRATION CONTROL SYSTEM WITH SUPPORT BASE DIVIDED INTO PLURAL SECTIONS, AND METHOD FOR CONTROLLING VIBRATION CONTROL SYSTEM

摘要

PROBLEM TO BE SOLVED: To provide a vibration control system having a large installation area for minimizing shock of a movable loading base.SOLUTION: The vibration control system comprises a support base divided into plural rigidity parts. A cross region between the rigid parts has rigidity lower than that of the rigidity parts. A loading base that can move at least in an enlarging direction of the rigidity parts is arranged on the support base. The rigidity parts are arranged on pneumatic bearings. The pneumatic bearings of the respective rigidity parts are independent from each other, and controlled according to a position of the movable loading base.