SILICON CARBIDE POWDER HAVING HIGH DISPERSIBILITY IN OIL

摘要

PROBLEM TO BE SOLVED: To provide silicon carbide powder having high dispersibility in oil capable of easily detaching works after cutting and polishing when works such as a wafer by oily oil slurry containing silicon carbide powder as a constitutional component is cut and polished.SOLUTION: The silicon carbide powder having high dispersibility in oil has a property that the viscosity of water slurry does not increase over time when silicate carbide is made as water slurry. The silicon carbide powder having high dispersibility in oil is preferably applied to a boiling water treatment with ion exchange water or deionized water or heating treated with alkaline water and its average particle diameter is preferably 1 to 7 μm.