| 摘要 |
PROBLEM TO BE SOLVED: To provide an acoustic transducer capable of attaining a large dynamic range and favorable acoustic characteristics in a microphone as much as possible.SOLUTION: An acoustic transducer including at least a first sensing part and a second sensing part detects a sonic wave and converts it into an electric signal on the basis of the change of an electrostatic capacity between a vibration electrode arranged in a diaphragm and a fixed electrode arranged in a fixed film, and output the signal. The first sensing part and the second sensing part share the fixed film, and the vibration electrode is divided into a first sensing area and a second sensing area corresponding to the respective sensing parts. In the first sensing part, the first sensing area is relatively fixed to the fixed film by a so-called floating fixing method. In the second sensing part, the vibration film of the second sensing area is fixed to a base plate or the fixed film in a state where a gap is formed between the fixed electrode and the vibration electrode. |
