METHOD OF INSPECTING INTEGRATED CIRCUIT DEVICE AND CHECKER

摘要

PROBLEM TO BE SOLVED: To provide an inspection method and a checker capable of inspecting an integrated circuit device having plural conductive members laminated thereon.SOLUTION: The inspection method is a method of inspecting an integrated circuit device in which plural conductive members are laminated thereon. The inspection method includes: a step in which the conductive member is ground while detecting an electrical potential of the first conductive member; a step in which the grinding is terminated based on the detection result; and a step in which a plane exposed by the grinding is inspected.