发明名称 SAMPLE HOLDER USED FOR SURFACE OBSERVATION OF SAMPLE AND CONTROL METHOD THEREOF
摘要 <p>PROBLEM TO BE SOLVED: To provide a sample holder for simply and promptly mounting a sample by coupling the body and stand of a sample holder and fixing the sample so as to observe the surface of the sample.SOLUTION: The sample holder used for the surface observation of a sample comprises: a body; a sample mounting part formed in one end of the body and for fixing the sample; elastic means positioned inside the body; and a stand detachable from the body. The stand includes: a base part served as the lower part of the stand; and a fastening part projected on the upper surface of the base part and having a through groove allowing insertion of at least a part of the sample mounting part. The sample mounting part comprises: a first grip part positioned at one end part of the sample mounting part and for fixing one side surface of the sample; and a second grip part movably coupled with the elastic means and for fixing the other side surfaces of the sample using the elasticity of the elastic means.</p>
申请公布号 JP2015056394(A) 申请公布日期 2015.03.23
申请号 JP20130218720 申请日期 2013.10.21
申请人 HITACHI HIGH-TECHNOLOGIES KOREA CO LTD 发明人 HEYOUNG HEYOUNG CHEOL
分类号 H01J37/20 主分类号 H01J37/20
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