发明名称 PHOTOCURABLE RESIN COMPOSITION AND PATTERN FORMING METHOD USING THE SAME
摘要 <p>PROBLEM TO BE SOLVED: To provide a photocurable resin composition exhibiting good releasing performance, from which a high-accuracy pattern can be formed by an imprint method, and to provide a pattern forming method using the photocurable resin composition.SOLUTION: The photocurable resin composition comprises at least one type of acrylic monomer, a polymerization initiator, and a fluorine-based surfactant, and shows a surface tension of 28 mN/m or less in air.</p>
申请公布号 JP2015054929(A) 申请公布日期 2015.03.23
申请号 JP20130189279 申请日期 2013.09.12
申请人 DAINIPPON PRINTING CO LTD 发明人 UCHIDA TOMOYA;OKAWA YASUO;HIRAKA TAKAAKI;ODA HIROKAZU
分类号 C08F2/44;B29C59/02;H01L21/027 主分类号 C08F2/44
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