| 摘要 |
PROBLEM TO BE SOLVED: To provide a schedule creation method for substrate processing apparatus and a program for the same capable of preventing the lowering of the throughput due to specified parallel processing sections by taking the processing of the subsequent lot into consideration.SOLUTION: A control section 31 creates an overall schedule after creating a single-batch schedule. When creating the overall schedule, the control section 31 determines whether or not a lot to be allocated is followed by a lot with specification. If a lot with specification is present, the control section 31 selects for the lot to be allocated a single-batch schedule which avoids the allocation to parallel processing sections CHB2, ONB2 already specified for the lot with specification. This means that since the processing of the subsequent lot is taken into consideration, the preceding lot never interferes with the allocation of a lot with specification even when the subsequent lot is the lot with specification. Thus the lowering of the throughput due to the specified parallel processing sections CHB2, ONB2 can be prevented. |
