发明名称 |
METHOD FOR MANUFACTURING PHOTOELECTRIC CONVERSION ELEMENT, AND ELECTRODE FOR LIGHT WATER ELECTROLYSIS |
摘要 |
PROBLEM TO BE SOLVED: To provide: a method for manufacturing a photoelectric conversion element that has a high photoelectric conversion efficiency; and an electrode for light water electrolysis, which is utilized for hydrogen production through water electrolysis.SOLUTION: A method for manufacturing a photoelectric conversion element includes: a first step of forming a Cu-Zn-Sn-based metal layered film including a Cu film, an Sn film and a Zn film, using an electrodeposition method on a substrate; a second step of annealing the Cu-Zn-Sn-based metal layered film to form a Cu-Zn-Sn-based metal alloy precursor; and a third step of sulfurizing the Cu-Zn-Sn-based metal alloy precursor to form a CZTS film. The CZTS film formed through the third step has a surface having a surface roughness of 0.5 μm or less. |
申请公布号 |
JP2015056421(A) |
申请公布日期 |
2015.03.23 |
申请号 |
JP20130187032 |
申请日期 |
2013.09.10 |
申请人 |
FUJIFILM CORP;OSAKA UNIV;JAPAN TECHNOLOGICAL RESEARCH ASSOCIATION OF ARTIFICIAL PHOTOSYNTHETIC CHEMICAL PROCESS |
发明人 |
IKEDA SHIGERU;JIANG FENG;AZUMA KOHEI |
分类号 |
H01L31/06 |
主分类号 |
H01L31/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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