发明名称 METHOD FOR MANUFACTURING PHOTOELECTRIC CONVERSION ELEMENT, AND ELECTRODE FOR LIGHT WATER ELECTROLYSIS
摘要 PROBLEM TO BE SOLVED: To provide: a method for manufacturing a photoelectric conversion element that has a high photoelectric conversion efficiency; and an electrode for light water electrolysis, which is utilized for hydrogen production through water electrolysis.SOLUTION: A method for manufacturing a photoelectric conversion element includes: a first step of forming a Cu-Zn-Sn-based metal layered film including a Cu film, an Sn film and a Zn film, using an electrodeposition method on a substrate; a second step of annealing the Cu-Zn-Sn-based metal layered film to form a Cu-Zn-Sn-based metal alloy precursor; and a third step of sulfurizing the Cu-Zn-Sn-based metal alloy precursor to form a CZTS film. The CZTS film formed through the third step has a surface having a surface roughness of 0.5 μm or less.
申请公布号 JP2015056421(A) 申请公布日期 2015.03.23
申请号 JP20130187032 申请日期 2013.09.10
申请人 FUJIFILM CORP;OSAKA UNIV;JAPAN TECHNOLOGICAL RESEARCH ASSOCIATION OF ARTIFICIAL PHOTOSYNTHETIC CHEMICAL PROCESS 发明人 IKEDA SHIGERU;JIANG FENG;AZUMA KOHEI
分类号 H01L31/06 主分类号 H01L31/06
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