| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a method of producing silicon nitride powder by baking powder of an amorphous Si-N(-H)-based compound using a rotary kiln furnace, which enables consistent production of silicon nitride powder having a high degree of crystallinity andαmolar fraction, irrespective of the dimension of the furnace core tube of the rotary kiln furnace.SOLUTION: A method of producing silicon nitride powder by using a rotary kiln furnace comprises: charging powder of an amorphous Si-N(-H)-based compound of a specific surface area of 400-1,200 m/g into the furnace core tube from the furnace core tube inlet; baking the powder of the amorphous Si-N(-H)-based compound at a maximum temperature of 1,400-1,700°C in an atmosphere of a nitrogen-containing inert gas or a nitrogen-containing reducing gas, while fluidizing the powder in a laminar form in the furnace core tube; and taking out silicon nitride powder from the furnace core tube outlet. The silicon nitride powder is produced by keeping the maximum thickness of the powder layer of the silicon nitride powder at the furnace core tube outlet within a range of 1-8 cm as a control index.</p> |
