| 摘要 |
<p>The present invention relates to a device to control the pressure of a stable chamber and, more specifically, to a device to control the pressure of a stable chamber, capable of accumulating a vaporized molecule discharged from a vaporizing chamber, and controlling the pressure of the stable chamber storing a predetermined volume. To achieve the purpose, disclosed is a device to control the pressure of a stable chamber, which includes a flux control part controlling the output flux of an inserted liquid material; a vaporizing chamber for vaporizing the liquid material inserted from the flux control part; a stable chamber accumulating a gas molecule vaporized in the vaporizing chamber, and maintaining the thermal balance of the gas molecule; and a pressure controller controlling the pressure of the stable chamber by controlling the flux control part by sensing the pressure of the stable chamber.</p> |
