| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide an excimer lamp lighting device which allows for detection of the partial non-lighting state of an excimer lamp, while avoiding insufficient processing of a processed object when used as te light source of a light irradiation device.SOLUTION: An excimer lamp lighting device is constituted to include a control section having a function for detecting the partial non-lighting state of an excimer lamp, when a voltage value detected by a voltage detecting section and inputted to the excimer lamp falls within a preset partial non-lighting voltage region. The control section a function for stopping the lighting operation of the excimer lamp or a function for externally notifying of the partial non-lighting state, when such a state that the voltage value detected by the voltage detecting section falls within the partial non-lighting voltage region is continuing for a setting time or longer is detected.</p> |
