| 摘要 |
<p>A manual vehicle for transferring cassettes is disclosed. The manual vehicle loads and supports two cassettes spaced from each other vertically, and the two cassettes are elevated. Therefore, by using the single manual vehicle, cassettes in which after use-masks are loaded can be transferred from a chamber and cassettes in which before use-masks are loaded can be transferred to the chamber. Accordingly, the productivity is increased. In addition, because the two cassettes spaced vertically from each other are elevated, the height of the cassettes can be adjusted based on the height of a conveyor and the height of the chamber. Accordingly, the single manual vehicle can be applied to apparatuses having a range of heights, and this enhances the economic efficiency.</p> |
