发明名称 SEMICONDUCTOR STORAGE DEVICE AND MANUFACTURING METHOD OF THE SAME
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor storage device and a manufacturing method of the same, which can simplify a structure of a layer selection part of a plurality os electrode layers.SOLUTION: A semiconductor storage device of an embodiment comprises: a laminate having a plurality of electrode layers and a plurality of insulation layers, which are alternately laminated on a substrate one by one; a channel body which pierces the plurality of electrode layers and extends in a lamination direction of the laminate; a memory film which is provided between the electrode layers and the channel body and includes a charge storage film; a plurality of contact parts which are provided at an end of each of the plurality of electrode layers in a convex shape, in which the plurality of contact parts are displaced in a planar direction of the substrate so as not to overlap each other in the lamination direction; and a plurality of plugs which extend from respective contact part toward respective circuit interconnections to connect the respective contact parts and the respective circuit interconnections.
申请公布号 JP2015056452(A) 申请公布日期 2015.03.23
申请号 JP20130187675 申请日期 2013.09.10
申请人 TOSHIBA CORP 发明人 NAKAGI HIROSHI
分类号 H01L21/8247;H01L21/336;H01L21/768;H01L23/522;H01L27/115;H01L29/788;H01L29/792 主分类号 H01L21/8247
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