发明名称 |
METHOD OF FORMING FINE PATTERN, PEELING METHOD, METHOD OF FORMING MAGNETIC RECORDING MEDIUM, MAGNETIC RECORDING MEDIUM AND METHOD OF MANUFACTURING STAMPER |
摘要 |
PROBLEM TO BE SOLVED: To provide a pattern forming method ensuring precise pattern dimensions.SOLUTION: The pattern forming method includes the steps of: forming a processed layer over a substrate; preparing a noble metal microparticle layer coating liquid, which contains microparticles coated by high polymer material, by adding a second fluid dispersion a high polymer material which containing polymer chain having a base metal at the end thereof and a second solvent to a first fluid dispersion which contains noble metal microparticles and a first solvent; arranging noble metal microparticles coated by high polymer material over the processed layer by using the noble metal microparticle layer coating liquid; and transferring a rugged pattern of noble metal microparticles coated by the high polymer material. |
申请公布号 |
JP2015056187(A) |
申请公布日期 |
2015.03.23 |
申请号 |
JP20130187570 |
申请日期 |
2013.09.10 |
申请人 |
TOSHIBA CORP |
发明人 |
TAKIZAWA KAZUTAKA;KIMURA KAORI;TAKEO AKIHIKO |
分类号 |
G11B5/84;G11B5/65 |
主分类号 |
G11B5/84 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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