发明名称 METHOD OF FORMING FINE PATTERN, PEELING METHOD, METHOD OF FORMING MAGNETIC RECORDING MEDIUM, MAGNETIC RECORDING MEDIUM AND METHOD OF MANUFACTURING STAMPER
摘要 PROBLEM TO BE SOLVED: To provide a pattern forming method ensuring precise pattern dimensions.SOLUTION: The pattern forming method includes the steps of: forming a processed layer over a substrate; preparing a noble metal microparticle layer coating liquid, which contains microparticles coated by high polymer material, by adding a second fluid dispersion a high polymer material which containing polymer chain having a base metal at the end thereof and a second solvent to a first fluid dispersion which contains noble metal microparticles and a first solvent; arranging noble metal microparticles coated by high polymer material over the processed layer by using the noble metal microparticle layer coating liquid; and transferring a rugged pattern of noble metal microparticles coated by the high polymer material.
申请公布号 JP2015056187(A) 申请公布日期 2015.03.23
申请号 JP20130187570 申请日期 2013.09.10
申请人 TOSHIBA CORP 发明人 TAKIZAWA KAZUTAKA;KIMURA KAORI;TAKEO AKIHIKO
分类号 G11B5/84;G11B5/65 主分类号 G11B5/84
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