发明名称 SHEET STICKING DEVICE AND STICKING METHOD
摘要 <p>PROBLEM TO BE SOLVED: To provide a sheet sticking device, up-sizing and complication of which can be suppressed.SOLUTION: A sheet sticking device 1 includes support means 2 having a stuck body support surface 23A and an unnecessary sheet support surface 21A provided on the outside thereof, supply means 3 for supplying an adhesive sheet AS to a position facing the stuck surface WF1 of a stuck body WF, press means 4 having a press member 42 for sticking the adhesive sheet AS to the stuck surface WF1 and unnecessary sheet support surface 21A by pressing, cutting means 6 for cutting the adhesive sheet AS, and sectioning the adhesive sheet AS into a sheet stuck to the stuck surface WF1 and an unnecessary sheet stuck to the unnecessary sheet support surface 21A, and peeling means 7 for peeling the unnecessary sheet. The peeling means 7 includes a peeling member 73 capable of peeling the unnecessary sheet from the unnecessary sheet support surface 21A, by passing the unnecessary sheet between the press member 42, and cooperating with the press member 42 to move the unnecessary sheet from one end side to the other end side of the unnecessary sheet support surface 21A.</p>
申请公布号 JP2015056611(A) 申请公布日期 2015.03.23
申请号 JP20130190768 申请日期 2013.09.13
申请人 LINTEC CORP 发明人 MENJU TOSHIAKI
分类号 H01L21/683;H01L21/301 主分类号 H01L21/683
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