CHARGED PARTICLE BEAM DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a charged particle beam device capable of realizing restriction of electrostatic breakage and proper charging adhesion during pre-dose.SOLUTION: A charged particle beam device according to the present invention comprises a control device for switching a first charged particle beam scanned to acquiring an image or a waveform signal, and a second charged particle beam scanned on a specimen before scanning of the first charged particle beam and charging the specimen more than the first charged particle beam. At least one of signal waveform data and image data of patterns formed on the specimen is acquired on the basis of scanning of the specimen with the second charged particle beam. When the data is in a predetermined state, scanning of the second charged particle beam is stopped.