摘要 |
PROBLEM TO BE SOLVED: To provide a measuring method that achieves both highly accurate thermometry and shape measurement, and a device thereof.SOLUTION: A multi wavelength radiation thermometer includes: a diaphragm which shields a part of thermal radiation light generated from a target; a two-dimensional diffraction element which disperses thermal radiation light transmitted through the coding diaphragm depending on a wavelength region; and a two-dimensional sensor which detects the thermal radiation light dispersed by the two-dimensional diffraction element. |