发明名称 Method of manufacturing an abrasive particles and polishing slurry
摘要 <p>Disclosed in the present invention is a method for manufacturing polishing particles, which comprises the steps of: manufacturing mother particles having polyhedral crystal surface by mixing an aqueous first precursor material solution and a diluted base solution and thermally treating; and forming multiple sub-particles protruded to the outer side from the surface of the mother particles by putting a base solution to a mixing solution having the mother particles mixed, mixing an aqueous second precursor material solution, and thermally treating.</p>
申请公布号 KR20150030592(A) 申请公布日期 2015.03.20
申请号 KR20140046562 申请日期 2014.04.18
申请人 INDUSTRIAL BANK OF KOREA 发明人 JUNG, SEUNG WON
分类号 C09K3/14;H01L21/304 主分类号 C09K3/14
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