发明名称 METHOD OF MEASUREMENT OF NANOSIZE MAGNETIC FILM PARAMETERS
摘要 FIELD: measurement equipment.SUBSTANCE: invention relates to measurement equipment, represents a method to measure magnetic properties and thickness of nanosize magnetic films and may be used in magnetic nanoelectronis to characterise heterogenic magnetic elements in memory devices, in sensor devices, etc. In realisation of the method the film with the help of an inductive system of open type is magnetised in alternating field in presence of direct field, they measure even high harmonics, arising as a result of symmetry loss by direct field, and for analysis they use the ratio of their amplitudes.EFFECT: increased functional flexibility of the method, also its applicability for in situ characterisation of magnetic films, and expanded range of its application, in particular, to characterise nanosize film structures.4 dwg
申请公布号 RU2544276(C1) 申请公布日期 2015.03.20
申请号 RU20130149967 申请日期 2013.11.08
申请人 FEDERAL'NOE GOSUDARSTVENNOE AVTONOMNOE OBRAZOVATEL'NOE UCHREZHDENIE VYSSHEGO PROFESSIONAL'NOGO OBRAZOVANIJA "NATSIONAL'NYJ ISSLEDOVATEL'SKIJ TEKHNOLOGICHESKIJ UNIVERSITET "MISIS" 发明人 PANINA LARISA VLADIMIROVNA;MORCHENKO ALEKSANDR TIMOFEEVICH;JUDANOV NIKOLAJ ANATOL'EVICH;KOSTISHIN VLADIMIR GRIGOR'EVICH
分类号 G01R33/12;G01N27/72 主分类号 G01R33/12
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