| 摘要 |
<p>The purpose of the present invention is to complement that the hardness is low, the wear amount is high, and degradation and discoloration caused by ultraviolet rays are generated in a polycarbonate material. The present invention relates to a method to deposit a thin film capable of improving ultraviolet rays-blocking properties, and increasing the hardness and reducing the wear amount by depositing a hydrogenated silicon nitride film on the surface of a polycarbonate, and depositing an aluminum-silicon-nitride film on top thereof; and an apparatus thereof. In other words, an aluminum, silicon sputtering target is mounted on a magnetron deposition source used as a deposition source for depositing a thin film, and nitrogen gas and hydrogen gas are inserted into a deposition apparatus during a process, thereby a hydrogenated silicon nitride film for blocking ultraviolet rays is deposited on the surface of a polycarbonate substrate, and an aluminum-silicon-nitride film with high hardness is deposited on top thereof. The present invention has an effect of improving ultraviolet rays weather resistance, and hardness and abrasion resistance of polycarbonate for preventing a crack due to the temperature difference, and for replacing a glass for a vehicle by depositing a transparent film.</p> |
