| 摘要 |
<p>Disclosed is an apparatus capable of processing gas exhausted during a process of manufacturing a light emitting diode. Gliding plasma is used to burn a processing gas having flammability and explosiveness. The processing gas including hydrogen or ammonia has high flammability and explosive danger through chain reaction at high temperature. To prevent the explosive danger, the combustible gliding plasma is formed at low temperature and the plasma flame burns the processing gas in a combustion unit. An additional combustion unit filled with combustion ceramic balls may be provided for the purpose of perfect combustion. The dusts created by the combustion operation are filtered by a dust processing unit.</p> |
