| 摘要 |
FIELD: instrumentation.SUBSTANCE: method of manufacturing of thin film nano- and microelectromechanical system of high temperature transmitter of mechanical values means that on the planar surface of the resilient element by the vacuum spraying the heterogeneous structure of the nano- and microfilms of materials is made, it contains thin film dielectric, piezoresistive and contact layers, the strain gauges, contact conductors and contact pads are formed. The piezoresistive layer is formed by magnetron spraying in the vacuum chamber with simultaneous use of two targets out of nickel and titanium. The resilient element with formed on it dielectric layer is installed on rotary table, heated, argon pressure is created, then rotary table is rotated with resilient element, at that definite current densities are set in zones of the targets spraying. Then the resilient element is held in vacuum at elevated temperature.EFFECT: invention ensures widening of the work temperature range of the transmitter based on thin film nano- and microelectromechanical system, improves repeatability of such parameters of the strain gauges as electric resistance and temperature resistance coefficient, reduction if the transmitters temperature sensitivity.2 cl, 5 dwg |
