发明名称 INCLINED DIFFRACTION GRATINGS AND METHOD OF MAKING INCLINED DIFFRACTION GRATINGS
摘要 FIELD: physics, optics.SUBSTANCE: present invention relates to formation of a phase-contrast image which displays phase information of coherent radiation passing through a scanned object. Said image is formed using a focusing diffraction grating whose channels have smooth walls and are inclined with respect to each other. Said channels of focusing diffraction gratings are formed using electromagnetic radiation of a laser, which is directed at an angle to the surface of the processed grating. After laser processing, the channels undergo etching to smooth out their surfaces.EFFECT: reduced formation of a trapezoidal section when projecting at a specific angle to the optical axis.15 cl, 17 dwg
申请公布号 RU2544390(C2) 申请公布日期 2015.03.20
申请号 RU20120101313 申请日期 2010.06.09
申请人 KONINKLEJKE FILIPS EHLEKTRONIKS N.V. 发明人 FOGTMAJER GEREON;EHNGEL' KLAUS J.;KELER TOMAS;RESSL' EHVAL'D;SHLOMKA JENS-PETER
分类号 G02B5/18;G01N23/04 主分类号 G02B5/18
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