COATING ARCHITECTURE FOR PLASMA SPRAYED CHAMBER COMPONENTS

摘要

A method of plasma spraying an article comprises inserting the article into a vacuum chamber for a low pressure plasma spraying system. A low pressure plasma spray process is then performed by the low pressure plasma spraying system to form a first plasma resistant layer having a thickness of 20-500 microns and a porosity of over 1%. A plasma spray thin film, plasma spray chemical vapor deposition or plasma spray physical vapor deposition process is then performed by the low pressure plasma spraying system to deposit a second plasma resistant layer on the first plasma resistant layer, the second plasma resistant layer having a thickness of less than 50 microns and a porosity of less than 1%.

主权项

1. An article comprising:
a body; a first plasma-sprayed plasma resistant ceramic layer on at least one surface of the body, the first plasma resistant ceramic layer having a porosity of 1-5% and a thickness of 20-500 microns; and a second plasma-sprayed plasma resistant ceramic layer on the first plasma-sprayed plasma resistant ceramic layer, the second plasma-sprayed plasma resistant ceramic layer having a porosity of less than 1% and a thickness of less than 100 microns.