ELECTROMECHANICAL TRANSDUCER ELEMENT, METHOD OF MANUFACTURING THE SAME, LIQUID DROPLET DISCHARGE HEAD, AND LIQUID DROPLET DISCHARGE DEVICE

摘要

An electromechanical transducer element includes a substrate; a first electrode formed on the substrate as a common electrode; an electromechanical transducer membrane formed on the first electrode; a second electrode formed on the electromechanical transducer membrane as an individual electrode; a first insulation protection membrane formed on the first and the second electrode; a third electrode electrically connected to the first electrode; a fourth electrode electrically connected to the second electrode; a second insulation protection membrane including a common electrode pad formed on the third electrode and plural individual electrode pads formed on the fourth electrode; and a fifth electrode formed so as to surround a vicinity of at least one of the individual electrode pads disposed at end parts.;Further, the fifth electrode is formed on the first insulation protection membrane and is electrically connected to the first electrode.

主权项

1. An electromechanical transducer element comprising:
a substrate; a first electrode formed on the substrate and configured to serve as a common electrode; an electromechanical transducer membrane formed on the first electrode; a second electrode formed on the electromechanical transducer membrane and configured to serve as an individual electrode; a first insulation protection membrane formed on the first electrode and the second electrode and having plural contact holes; a third electrode formed so as to be electrically connected to the first electrode through one of the contact holes; a fourth electrode formed so as to be electrically connected to the second electrode through one of the contact holes; a second insulation protection membrane including a common electrode pad formed on the third electrode and plural individual electrode pads formed on the fourth electrode and in a predetermined line; and a fifth electrode formed so as to surround a vicinity of at least one of the individual electrode pads disposed at end parts in the predetermined line, wherein the fifth electrode is formed on the first insulation protection membrane and is electrically connected to the first electrode through one of the contact holes.