发明名称 CURVED-SURFACE MODULE LAYERING DEVICE AND LAYERING METHOD
摘要 [Problem] To provide a layering device and layering method capable of stably and easily layering a module having a curved surface. [Solution] The layering method of the present invention comprises positioning a layering object having a curved surface in a space between first and second elastic, heat-resistant diaphragms and ventilating the space between the first and second diaphragms while applying heat, thereby performing layering at a pressure applied at atmospheric pressure to the first and second diaphragms. A layering device for this method is provided with: members (10, 20) in which a first diaphragm (11) and a second diaphragm (21) are each extended, a first airtight space (14) and a second airtight space (24) are each provided, and a layering object (50) is accommodated in a third sealed space (51) between the diaphragms; a ventilating means for creating a vacuum in the airtight spaces; and a heating means (28) for heating the layering object.
申请公布号 WO2015037135(A1) 申请公布日期 2015.03.19
申请号 WO2013JP74886 申请日期 2013.09.13
申请人 NPC INCORPORATED 发明人 KUMAMOTO SUEHIRO;FURUKAWA TAKUMA;MIYABAYASHI RYOSUKE
分类号 B29C63/16;H01L31/042 主分类号 B29C63/16
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